Figure 1 from A study of sub-atmospheric chemical vapor deposition (SACVD) O3-TEOS UGS, BPSG, PSG, and plasma enhanced chemical vapor deposition (PECVD) PSG film as sacrificial layers in a micro-fluid dispenser device
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Figure 1 from Conformal doping of 3-D structures using sub-atmospheric CVD films | Semantic Scholar
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Figure 1 from Conformal doping of 3-D structures using sub-atmospheric CVD films | Semantic Scholar
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COMPARISON OF 100 TORR AND 200 TORR BPSG LAYER DEPOSITED USING SUB ATMOSPHERIC CHEMICAL VAPOUR DEPOSITION (SACVD) PROCESS . | Semantic Scholar
